Title: Study of CVD high-k gate oxides on high-mobility Ge and Ge/Si substrates
Authors: Van Elshocht, Sven ×
Caymax, Matty
Conard, Thierry
De Gendt, Stefan
Hoflijk, Ilse
Houssa, Michel
Leys, Frederik
Bonzom, Renaud
De Jaeger, Brice
Van Steenbergen, Jan
Vandervorst, Wilfried
Heyns, Marc
Meuris, Marc #
Issue Date: 2005
Conference: 4th International Conference on Silicon Epitaxy and Heterostructures - ICSI-4 location:Leuven Belgium date:23/05/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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