Title: Reliability of ultra-thin gate oxide below 3 nm in the direct tunneling regime
Authors: Depas, Michel ×
Degraeve, Robin
Nigam, Tanya
Groeseneken, Guido
Heyns, Marc #
Issue Date: 1997
Series Title: Japanese J. of Appl. Phys. Part 1 vol:36 pages:1602-1608
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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