Title: TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films
Authors: Conard, Thierry ×
Vandervorst, Wilfried
Petry, Jasmine
Zhao, Chao
Besling, W
Nohira, Hiroshi
Richard, Olivier #
Issue Date: 2003
Series Title: Applied Surface Science vol:203-204 pages:400-403
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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