|ITEM METADATA RECORD
|Title: ||TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films|
|Authors: ||Conard, Thierry ×|
Richard, Olivier #
|Issue Date: ||2003 |
|Series Title: ||Applied Surface Science vol:203-204 pages:400-403|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science