Title: The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches
Authors: De Coster, Jeroen ×
Tilmans, Harrie
van Beek, J.T.M
Rijks, T.G.S.M
Puers, Robert #
Issue Date: 2004
Publisher: IOP
Series Title: Journal of micromechanics and microengineering: structures, devices and systems vol:14 issue:9 pages:S49-S54
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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