Title: Damage accumulation and dopant migration during shallow As and Sb implantation into Si
Authors: Werner, M ×
van den Berg, J.A
Armour, D.G
Vandervorst, Wilfried
Collart, E.H.J
Goldberg, R.D
Bailey, P
Noakes, T.C.Q #
Issue Date: Feb-2004
Publisher: North-Holland Physics Pub.
Series Title: Nuclear Instruments & Methods in Physics Research B vol:216 pages:67-74
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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