Title: Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations
Authors: Genoe, Jan
Heremans, Paul
Kuijk, Maarten
Vounckx, Roger
Borghs, Staf
Issue Date: 1997
Conference: Microlens Arrays Conference, EOS Topical Meeting; May 15-16 1997; London, UK.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering (ESAT) TC, Technology Campus Diepenbeek
Technologiecluster ESAT Elektrotechnische Engineering

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