Title: Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system
Authors: Iacopi, Francesca ×
Brongersma, Sywert
Maex, Karen #
Issue Date: 2003
Series Title: Applied Physics Letters vol:82 issue:9 pages:1380-1382
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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