|ITEM METADATA RECORD
|Title: ||Kilometer long copper low-k interconnects|
|Authors: ||Tokei, Zsolt|
|Issue Date: ||2002 |
|Conference: ||European Congress on Advanced Materials, their Processes and Applications location:Leuven Belgium date:30/09/02|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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