Title: Kilometer long copper low-k interconnects
Authors: Tokei, Zsolt
Brongersma, Sywert
Maex, Karen
Issue Date: 2002
Conference: European Congress on Advanced Materials, their Processes and Applications location:Leuven Belgium date:30/09/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.