Title: Anisotropic etching of inverted pyramids in the sub-100 nm region
Authors: Hantschel, Thomas ×
Vandervorst, Wilfried #
Issue Date: 1997
Series Title: Microelectronic Engineering vol:33 pages:405-407
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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