Title: Epitaxial staircase structure for the calibration of electrical characterization techniques
Authors: Clarysse, Trudo ×
Caymax, Matty
De Wolf, Peter
Trenkler, Thomas
Vandervorst, Wilfried
McMurray, J. S
Kim, J
Williams, C. C
Clark, J. G
Neubauer, G #
Issue Date: 1998
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:16 issue:1 pages:394-400
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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