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Title: Two-dimensional profiling in silicon using conventional and electrochemical selective etching
Authors: Trenkler, Thomas ×
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: 1998
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:16 issue:1 pages:349-354
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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