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Title: Cross-sectional nano-spreading resistance profiling
Authors: De Wolf, Peter ×
Clarysse, Trudo
Vandervorst, Wilfried
Hellemans, Louis
Niedermann, P
Hänni, W #
Issue Date: 1998
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:16 issue:1 pages:355-361
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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