Title: Surface processes occuring on TiSi2 and CoSi2 in fluorine-based plasmas: afterglow of NF3 plasma
Authors: Baklanov, Mikhaïl ×
Vanhaelemeersch, Serge
Storm, Wolfgang
Vandervorst, Wilfried
Maex, Karen #
Issue Date: 1998
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:16 issue:1 pages:167-172
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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