Title: Plasma etching of organic low-dielectric-constant polymers: comparative analysis
Authors: Baklanov, Mikhaïl ×
Vanhaelemeersch, Serge
Alaerts, Carine
Maex, Karen #
Issue Date: 1998
Host Document: pages:247-252
Conference: Low Dielectric Constant Materials and Applications in Microelectronics IV; MRS spring Meeting, April 14-16, 1998, San Francisco,
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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