This item still needs to be validated !
Title: Control and impact of processing ambient during rapid thermal silicidation
Authors: Maex, Karen
Kondoh, Eiichi
Lauwers, A
Steegen, An
de Potter de ten Broeck, Muriel
Besser, Paul
Proost, Joris #
Issue Date: 1998
Host Document: pages:297-306
Conference: Rapid and Contact Integrated Processing VII.;
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
Department of Materials Engineering - miscellaneous
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science