Title: New approaches for formation of ultra-thin PtSi layers for infrared applications
Authors: Donaton, R ×
Jin, S
Bender, Hugo
Zagrebnov, Maxim
Baert, Kris
Maex, Karen
Vantomme, André
Langouche, Guido #
Issue Date: 1998
Host Document: pages:241
Conference: Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits;
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science