Title: Segregation of Cu on etched and non-etched Al(Cu) surface
Authors: Li, H ×
Maex, Karen
Brijs, Bert
Conard, Thierry
Vandervorst, Wilfried
Baklanov, Mikhaïl
Boullart, Werner
Froyen, Ludo #
Issue Date: 1998
Host Document: pages:77-82
Conference: Materials Reliability in Microelectronics VIII; MRS Spring Meeting. April 13-16, 1998, San Francisco, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
Physical Metallurgy and Materials Engineering Section (-)
× corresponding author
# (joint) last author

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