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Title: Finite element simulations of the mechanical stress in and around TiSi2 lines
Authors: Steegen, An
De Wolf, Ingrid
Maex, Karen
Ignat, M #
Issue Date: 1998
Host Document: pages:227-232
Conference: Micromechanical Structures for Materials Research; MRS Spring Meeting;April 15-16, 1998; San Francisco, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
# (joint) last author

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