ITEM METADATA RECORD
Title: In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer
Authors: Kondoh, Eiichi ×
Vereecke, Guy
Maex, Karen
Gutt, T
Nényei, Z #
Issue Date: 1998
Host Document: pages:51-56
Conference: Rapid Thermal and Integrated Processing VII; location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.