|ITEM METADATA RECORD
|Title: ||In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer|
|Authors: ||Kondoh, Eiichi ×|
Nényei, Z #
|Issue Date: ||1998 |
|Host Document: ||pages:51-56|
|Conference: ||Rapid Thermal and Integrated Processing VII; location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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