Title: In-line electrical metrology for high-k gate dielectrics deposited by atomic layer chemical vapour deposition
Authors: De Witte, H ×
Maes, Jan
Passefort, S
Besling, W
Eason, K
Young, E
Rittersma, Chris
Heyns, Marc #
Issue Date: Sep-2002
Publisher: ICG Publishing Ltd
Series Title: Semiconductor Fabtech issue:17 pages:111-115
ISSN: 1355-8633
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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