Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing; August 31 - Septemb, Date: 1997/09/01, Location: Leuven Belgium

Publication date: 1998-01-01
Volume: 35 Pages: 247 - 55
ISSN: 1-56677-188-9
Publisher: ELECTROCHEMICAL SOCIETY INC

CLEANING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING V

Author:

Kenens, Conny
De Gendt, Stefan ; Knotter, DM ; Loewenstein, Lee ; Meuris, Marc ; Vandervorst, Wilfried ; Heyns, Marc ; Ruzyllo, J ; Novak, RE ; Appel, CM ; Hattori, T ; Heyns, M

Keywords:

Science & Technology, Physical Sciences, Technology, Electrochemistry, Engineering, Chemical, Engineering, Electrical & Electronic, Engineering