Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing; August 31 - Septemb, Date: 1997/09/01, Location: Leuven Belgium
Publication date:
1998-01-01
Volume:
35
Pages:
455 -
62
ISSN:
1-56677-188-9
Publisher:
ELECTROCHEMICAL SOCIETY INC
CLEANING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING V
Author:
Trauwaert, Marie-Astrid
Kenis, Karine ; Caymax, Matty ; Mertens, Paul ; Heyns, Marc ; Vanhellemont, Jan ; Gräf, D ; Wagner, Patrick ; Ruzyllo, J ; Novak, RE ; Appel, CM ; Hattori, T ; Heyns, M
Keywords:
Science & Technology, Physical Sciences, Technology, Electrochemistry, Engineering, Chemical, Engineering, Electrical & Electronic, Engineering