ITEM METADATA RECORD
Title: Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Authors: De Witte, Hilde ×
Vandervorst, Wilfried
Gijbels, Renaat #
Issue Date: 1998
Host Document: pages:327-330
Conference: SIMS XI - Secondary Ion Mass Spectrometry; 8-12 September 1997; Orlando, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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