|ITEM METADATA RECORD
|Title: ||Modeling of bombardment induced oxidation of silicon with and without oxygen flooding|
|Authors: ||De Witte, Hilde ×|
Gijbels, Renaat #
|Issue Date: ||1998 |
|Host Document: ||pages:327-330|
|Conference: ||SIMS XI - Secondary Ion Mass Spectrometry; 8-12 September 1997; Orlando, CA, USA.|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.