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Title: Characterization of TiN films deposited by atomic layer deposition
Authors: Besling, W.F.A ×
Satta, Alessandra
Schuhmacher, Jörg
Beyer, Gerald
Maex, Karen
Kilpela, Olli
Sprey, Hessel #
Issue Date: 2002
Publisher: AVS
Host Document: pages:56-58
Conference: Proceedings of the 3rd AVS International Conference on Microelectronics and Interfaces location:Leuven Belgium date:11/02/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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