Title: Study of the transient phenomena in SIMS depth profiling using combined SIMS-RBS
Authors: Deleu, Jeroen ×
Brijs, Bert
Vandervorst, Wilfried #
Issue Date: 1998
Host Document: pages:359-362
Conference: SIMS XI - Secondary Ion Mass Spectrometry; 8-12 September 1997; Orlando, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.