|ITEM METADATA RECORD
|Title: ||Study of the transient phenomena in SIMS depth profiling using combined SIMS-RBS|
|Authors: ||Deleu, Jeroen ×|
Vandervorst, Wilfried #
|Issue Date: ||1998 |
|Host Document: ||pages:359-362|
|Conference: ||SIMS XI - Secondary Ion Mass Spectrometry; 8-12 September 1997; Orlando, CA, USA.|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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