Title: Investigation of correlations between parameters defining the state of sputtered particles
Authors: Vlekken, J ×
Croes, Kris
D'olieslaeger, Marc
Knuyt, G
Vandervorst, Wilfried
De Schepper, Luc #
Issue Date: 1998
Host Document: pages:931-934
Conference: SIMS XI - Secondary Ion Mass Spectrometry; 8-12 September 1997; Orlando, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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