Title: Mechanical design of RF-MEMS capacitive switches
Authors: De Coster, Jeroen ×
Tilmans, Harrie
Hameyer, Kay
Puers, Robert #
Issue Date: 2002
Publisher: STW
Host Document: pages:608-611
Conference: Proceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens location:Leuven Belgium date:29/11/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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