|ITEM METADATA RECORD
|Title: ||Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch|
|Authors: ||Klaasse, Gerard ×|
Tilmans, Harrie #
|Issue Date: ||2002 |
|Host Document: ||pages:631-634|
|Conference: ||Proceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens location:Leuven Belgium date:29/11/02|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
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