ITEM METADATA RECORD
Title: Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch
Authors: Klaasse, Gerard ×
Puers, Robert
Tilmans, Harrie #
Issue Date: 2002
Publisher: STW
Host Document: pages:631-634
Conference: Proceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens location:Leuven Belgium date:29/11/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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