Title: Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch
Authors: Klaasse, Gerard ×
Puers, Robert
Tilmans, Harrie #
Issue Date: 2002
Publisher: STW
Host Document: pages:631-634
Conference: Proceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens location:Leuven Belgium date:29/11/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.