Title: Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications
Authors: Caymax, Matty
Brijs, Bert
Carter, Richard
Claes, Martine
Conard, Thierry
De Gendt, Stefan
Delabie, Annelies
Heyns, Marc
Richard, Olivier
Vandervorst, Wilfried
Zhao, Chao
Maes, Jan
Chen, Jerry
Cosnier, Vincent
Green, Martin
Kaushik, Vidya
Kluth, Jon
Tsai, Wilman
Issue Date: 2002
Conference: Atomic Layer Deposition Conference - ALD location:Leuven Belgium date:19/08/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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