|ITEM METADATA RECORD
|Title: ||Characterization of porous structure in ultra-low-k dielectrics by depositing thin conductive cap layers|
|Authors: ||Iacopi, Francesca ×|
Maex, Karen #
|Issue Date: ||2003 |
|Series Title: ||Microelectronic Engineering vol:65 issue:01/02/07 pages:123-131|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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