Title: Characterization of porous structure in ultra-low-k dielectrics by depositing thin conductive cap layers
Authors: Iacopi, Francesca ×
Tokei, Zsolt
Stucchi, Michele
Brongersma, Sywert
Vanhaeren, Danielle
Maex, Karen #
Issue Date: 2003
Series Title: Microelectronic Engineering vol:65 issue:01/02/07 pages:123-131
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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