|ITEM METADATA RECORD
|Title: ||Present reliability issues in ultrathin oxinitride films|
|Authors: ||Kaczer, Ben ×|
Groeseneken, Guido #
|Issue Date: ||May-2005 |
|Host Document: ||pages:307-326|
|Conference: ||Silicon Nitride and Silicon Dioxide Thin Insulating Films and Other Emerging Dielectrics VIII location:Leuven Belgium date:16/05/05|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
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