Title: Present reliability issues in ultrathin oxinitride films
Authors: Kaczer, Ben ×
Degraeve, Robin
Arkhipov, Vladimir
Groeseneken, Guido #
Issue Date: May-2005
Publisher: ECS
Host Document: pages:307-326
Conference: Silicon Nitride and Silicon Dioxide Thin Insulating Films and Other Emerging Dielectrics VIII location:Leuven Belgium date:16/05/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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