Title: Shallow junction ion implantation in Ge and associate defect control
Authors: Satta, Alessandra ×
Simoen, Eddy
Janssens, Tom
Clarysse, Trudo
De Jaeger, Brice
Benedetti, Alessandro
Hoflijk, Ilse
Brijs, Bert
Meuris, Marc
Vandervorst, Wilfried #
Issue Date: 2006
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:153 issue:3 pages:G229-G233
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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