This item still needs to be validated !
Title: Theoretical investigation of nanocrystalline diamond thin film bulk acoustic resonators (FBAR) for mass sensing applications
Authors: Francis, Laurent ×
Pan, Wanling
Geuens, Caroline
Kromka, Alexander
Tilmans, Harrie
Steinmueller-Nethl, Doris
Van Hoof, Chris #
Issue Date: 2005
Host Document: pages:232-235
Conference: 16th MicroMechanics Europe Workshop - MME location:Leuven Belgium date:05/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.