Title: Studies and optimization of HfO2 grown by HfCl4/H2O atomic layer deposition
Authors: Delabie, Annelies ×
Caymax, Matty
Brijs, Bert
Brunco, David
Conard, Thierry
Sleeckx, Erik
Ragnarsson, Lars-Ake
Van Elshocht, Sven
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2005
Publisher: The Electrochemical Society
Host Document: ECS Transactions vol:1 issue:5 pages:547
Conference: ECS Meetings edition:208th location:Los Angeles date:16-21 October
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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