Title: On the trap generation rate in ultrathin SiON under constant voltage stress
Authors: Degraeve, Robin ×
Kaczer, Ben
Roussel, Philippe
Groeseneken, Guido #
Issue Date: Jun-2005
Series Title: Microelectronic Engineering pages:440-443
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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