This item still needs to be validated !
Title: Silicides for advanced CMOS devices
Authors: Lauwers, Anne ×
Kittl, Jorge
Van Dal, Mark
Chamirian, Oxana
Kmieciak, Malgorzata
Torregiani, Cristina
Liu, J
Benedetti, Alessandro
Richard, Olivier
Bender, Hugo
van Berkum, J.G.M
Kaiser, M
Veloso, Anabela
Kottantharayil, Anil
de Potter de ten Broeck, Muriel
Maex, Karen #
Issue Date: 2005
Publisher: Springer
Conference: Microscopy of Semiconducting Materials. Proceedings of the 14th Conference location:Oxford UK date:11/04/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science