|ITEM METADATA RECORD
|Title: ||Dopant profiling in NixSi1-x gates with SIMS|
|Authors: ||Janssens, Tom ×|
Vandervorst, Wilfried #
|Issue Date: ||2005 |
|Conference: ||USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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