Title: Dopant profiling in NixSi1-x gates with SIMS
Authors: Janssens, Tom ×
Kmieciak, Malgorzata
Kittl, Jorge
Fouchier, Marc
Lauwers, Anne
Kottantharayil, Anil
Vandervorst, Wilfried #
Issue Date: 2005
Conference: USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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