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Title: Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks
Authors: Degraeve, Robin ×
Kauerauf, Thomas
Kerber, Andreas
Cartier, E
Govoreanu, Bogdan
Roussel, Philippe
Pantisano, Luigi
Blomme, Pieter
Kaczer, Ben
Groeseneken, Guido #
Issue Date: 2003
Publisher: IEEE
Host Document: pages:23-28
Conference: Proceedings 41st Annual IEEE International Reliability Physics Symposium location:Leuven Belgium date:30/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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