Title: Ni fully silicided gates for 45 nm CMOS applications
Authors: Kittl, Jorge
Lauwers, Anne
Kmieciak, Malgorzata
Van Dal, Mark
Veloso, Anabela
Kottantharayil, Anil
Pourtois, Geoffrey
Demeurisse, Caroline
Schram, Tom
Brijs, Bert
de Potter de ten Broeck, Muriel
Vrancken, Christa
Maex, Karen #
Issue Date: Aug-2005
Series Title: Microelectronic Engineering issue:82 pages:441-448
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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