Title: Wet etch characteristics of Hf-silicates
Authors: Claes, Martine ×
Paraschiv, Vasile
Dictus, Dries
Conard, Thierry
Boullart, Werner
Vanhaelemeersch, Serge
De Gendt, Stefan #
Issue Date: 2005
Publisher: The Electrochemical Society
Host Document: ECS Transactions vol:1 issue:5
Conference: ECS Meeting edition:208th location:Los Angeles, CA date:16-21 October
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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