Title: Investigation of the effect of the extension implant energy on deep submicron CMOS device perfomance
Authors: Kubicek, Stefan ×
Biesemans, Serge
De Meyer, Kristin #
Issue Date: 1997
Conference: ESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference; location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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