|ITEM METADATA RECORD
|Title: ||Investigation of the effect of the extension implant energy on deep submicron CMOS device perfomance|
|Authors: ||Kubicek, Stefan ×|
De Meyer, Kristin #
|Issue Date: ||1997 |
|Conference: ||ESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference; location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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