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Title: Demonstration of recessed SiGe S/D and inserted metal gate on HfO2 for high performance pFETs
Authors: Verheyen, Peter ×
Eneman, Geert
Rooyackers, Rita
Loo, Roger
Eeckhout, Lieve
Rondas, Dirk
Leys, Frederik
Snow, Jim
Shamiryan, Denis
Demand, Marc
Hoffmann, Thomas Y
Goodwin, Michael
Fujimoto, Hiromasa
Ravit, Claire
Lee, Byeong Chan
Caymax, Matty
De Meyer, Christina
Absil, Philippe
Jurczak, Malgorzata
Biesemans, Serge #
Issue Date: Dec-2005
Publisher: IEEE
Host Document: pages:907-910
Conference: Technical Digest International Electron Devices Meeting (IEDM) location:Leuven Belgium date:05/12/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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