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Title: Negative bias temperature instability (NBTI) in SiO2 and SiON gate dielectrics understood through disorder-controlled kinetics
Authors: Kaczer, Ben ×
Arkhipov, Vladimir
Jurczak, Malgorzata
Groeseneken, Guido #
Issue Date: Jun-2005
Series Title: Microelectronic Engineering vol:80 pages:122-125
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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