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Title: Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:H
Authors: Li, Yunlong ×
Tokei, Zsolt
Van Aelst, Joke
Carbonell, Laure
Baklanov, Mikhaïl
Richard, Olivier
Bender, Hugo
Groeseneken, Guido
Maex, Karen #
Issue Date: 2007
Publisher: IOP Pub.
Series Title: Semiconductor Science and Technology vol:22 issue:4 pages:320-325
ISSN: 0268-1242
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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