Title: Impact of high-k properties on MOSFET electrical characteristics
Authors: Pantisano, Luigi
Afanas'ev, Valeri
Ragnarsson, Lars-Ake
Houssa, Michel
Degraeve, Robin
Groeseneken, Guido
Schram, Tom
De Gendt, Stefan
Heyns, Marc
Issue Date: 2005
Host Document: Defects in High-k dielectric Stacks
Conference: NATO Advanced Research Workshop on Defects in Advanced High K Dielectrics location:St. Petersburg date:11/07/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Semiconductor Physics Section
Molecular Design and Synthesis

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