|ITEM METADATA RECORD
|Title: ||Impact of high-k properties on MOSFET electrical characteristics|
|Authors: ||Pantisano, Luigi|
De Gendt, Stefan
|Issue Date: ||2005 |
|Host Document: ||Defects in High-k dielectric Stacks|
|Conference: ||NATO Advanced Research Workshop on Defects in Advanced High K Dielectrics location:St. Petersburg date:11/07/05|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
Semiconductor Physics Section
Molecular Design and Synthesis
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