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Title: On the impact of the high-k properties (and defects) on the MOSFET electrical characteristics
Authors: Pantisano, Luigi
Afanas'ev, Valeri
Ragnarsson, Lars-Ake
Houssa, Michel
Degraeve, Robin
Groeseneken, Guido
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2005
Publisher: ECS
Conference: Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing IV. Satellite Symposium to ESSDERC location:Leuven Belgium date:16/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Semiconductor Physics Section
Molecular Design and Synthesis
# (joint) last author

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