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Title: Use of gettering and defect induced processes in ultra-thin buried oxide synthesis
Authors: Litovchenko, V. G ×
Efremov, A. A
Romanuk, B. N
Mel'nik, V. P
Claeys, Cor #
Issue Date: 1997
Host Document: pages:97-102
Conference: Proceedings of the 7th Conference on Gettering and Defect Engineering in the Semiconductor Technology (GADEST '97);
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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