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Title: Stimulated buried dielectric phase formation for nanelectronic aims
Authors: Litovchenko, V. G ×
Romanyuk, B. N
Efremov, A. A
Mel'nik, V. P
Claeys, Cor #
Issue Date: 1997
Host Document: pages:81-85
Conference: Silicon-on-Insulator Technology and Devices VIII;
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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