Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulations

6th European Conference on Ultimate Integration of Silicon - ULIS, Location: Pisa I

Publication date: 2005-04-01

Pages: 35 - 38

Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulations

Author:

Campera, A

Iannaccone, G ; Crupi, F ; Groeseneken, Guido