Title: Polarity dependence of bias temperature instabilities in Hf(x)Si(1-x)ON/TaN gate stacks
Authors: Aoulaiche, Marc ×
Houssa, Michel
Degraeve, Robin
Groeseneken, Guido
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2005
Publisher: IEEE
Host Document: pages:197-200
Conference: Proceedings of the 35th European Solid-State Device Research Conference - ESSDERC location:Leuven Belgium date:12/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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